联系人: 张小姐
手 机:13913143077
联系人:李先生
手 机:15895662155
邮 箱:kssunnyjx@126.com
Q Q:1191890920
微 信:kssunnyjx
网 址:www.leybold-inficon.com
The POWER Eco series cryo pump is a high performance energy saving cryo pump designed to reduce power consumption and cooling water flow.
Energy and resource saving
Power consumption and cooling water reduced by 15 to 70%
Reduced regeneration/startup time
Less than half of previous product. (compared with our previous product)
Improved pumping performance
Substantial argon pumping capacity increased 1.5 to 4 times. (compared with our previous product)
Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
Electronic component manufacturing equipment
Vacuum evaporation systems
Vacuum furnaces, space chambers
Accelerators
Various high vacuum equipment
Pump Type | P-085C | P-086C | P-086CL | P-087C | P-106C | P-106CL | P-126C | P-126CL | P-127C | Remarks | |
---|---|---|---|---|---|---|---|---|---|---|---|
Diameter | 8inch | 8inch | 8inch | 8inch | 10inch | 10inch | 12inch | 12inch | 12inch | ||
Shape | Vertical | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Horizontal | Vertical | ||
Pumping speed (L/S) | Nitrogen | 1,500 | 1,500 | 1,500 | 1,500 | 2,400 | 2,400 | 4,000 | 4,000 | 4,000 | |
Argon | 1,300 | 1,300 | 1,300 | 1,300 | 2,000 | 2,000 | 3,200 | 3,200 | 3,200 | ||
Hydrogen | 1,000 | 2,500 | 2,200 | 1,000 | 3,800 | 3,700 | 6,000 | 6,000 | 3,000 | ||
Water | 4,000 | 4,000 | 4,000 | 4,000 | 6,400 | 6,400 | 9,000 | 9,000 | 9,000 | ||
Maximum pumping flow(Pa·m3/s) | 1.2 | 1.2 | 1.1 | 1.2 | 1.0 | 1.0 | 0.8 | 0.8 | 0.8 | ||
Maximum gas instantaneous tolerance(Pa·m3) | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | ||
Startup time(min) | 60 | 65 | 80 | 60 | 85 | 100 | 95 | 105 | 70 | *1 | |
Regeneration (heat-up) time(min) | 40 | 40 | 45 | 40 | 45 | 50 | 45 | 50 | 40 | *1 | |
Startup regeneration time(min) | 100+α | 105+α | 125+α | 100+α | 130+α | 150+α | 140+α | 155+α | 110+α | *1 | |
Pumping capacity (Pa·m3) | Argon | 80,000 | 80,000 | 80,000 | 150,000 | 160,000 | 140,000 | 260,000 | 200,000 | 400,000 | *2 |
Hydrogen | 1,300 | 1,800 | 1,600 | 1,300 | 2,000 | 1,800 | 2,400 | 2,200 | 1,600 | ||
Ultimate temperature(K) | 15 or less | ||||||||||
Ultimate pressure(Pa) | Approx. 10-7 | ||||||||||
Maximum heating temperature(℃) | 70 | ||||||||||
Ambient temperature range(℃) | 10 to 35 | ||||||||||
Recommended maintenance interval(h) | Within 16,000h | ||||||||||
Weight(kg) | 22 | 22 | 22 | 23 | 24 | 25 | 29 | 30 | 29 | ||
Number of operable units | P-421CA | 3* | 3* | 3* | 3* | 2* | 2* | 2* | 2* | 2* | *3、*4 |
P-875CA | 5 | 5 | 5 | 5 | 4 | 4 | 4 | 4 | 4 | *3 |
Pump Type | P-128C | P-128CL | P-160C | P-161C | P-161CL | P-166C | P-201C | P-206C | P-226C | Remarks | |
---|---|---|---|---|---|---|---|---|---|---|---|
Diameter | 12inch | 12inch | 16inch | 16inch | 16inch | 16inch | 20inch | 20inch | 22inch | ||
Shape | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Vertical | Vertical | Vertical | ||
Pumping speed (L/S) | Nitrogen | 4,000 | 4,000 | 8,000 | 8,000 | 7,400 | 8,000 | 13,000 | 13,000 | 17,000 | |
Argon | 3,200 | 3,200 | 5,500 | 5,500 | 5,000 | 5,500 | 9,000 | 9,000 | 11,000 | ||
Hydrogen | 6,000 | 5,000 | 5,500 | 11,000 | 10,000 | 11,000 | 17,000 | 17,000 | 23,000 | ||
Water | 9,000 | 9,000 | 17,000 | 17,000 | 17,000 | 17,000 | 28,000 | 28,000 | 39,000 | ||
Maximum pumping flow(Pa·m3/s) | 2.2 | 2.2 | 2.2 | 2.0 | 2.2 | 3.5 | 1.3 | 3.0 | 2.7 | ||
Maximum gas instantaneous tolerance(Pa·m3) | 40 | 40 | 50 | 50 | 50 | 50 | 80 | 80 | 133 | ||
Startup time(min) | 110 | 115 | 70 | 90 | 120 | 80 | 150 | 100 | 120 | *1 | |
Regeneration (heat-up) time(min) | 70 | 70 | 40 | 60 | 60 | 60 | 70 | 80 | 80 | *1 | |
Startup regeneration time(min) | 180+α | 185+α | 110+α | 150+α | 180+α | 140+α | 220+α | 180+α | 200+α | *1 | |
Pumping capacity (Pa·m3) | Argon | 270,000 | 200,000 | 400,000 | 400,000 | 200,000 | 400,000 | 800,000 | 800,000 | 1,000,000 | *2 |
Hydrogen | 4,000 | 3,500 | 1,600 | 3,400 | 3,000 | 3,400 | 4,500 | 7,500 | 7,500 | ||
Ultimate temperature(K) | 15 or less | ||||||||||
Ultimate pressure(Pa) | Approx. 10-7 | ||||||||||
Maximum heating temperature(℃) | 70 | ||||||||||
Ambient temperature range(℃) | 10 to 35 | ||||||||||
Recommended maintenance interval(h) | Within 16,000h | ||||||||||
Weight(kg) | 33 | 34 | 50 | 50 | 65 | 50 | 60 | 60 | 87 | ||
Number of operable units | P-421CA | 1 | 1 | 1 | 1 | 1 | - | 1 | - | - | *4 |
P-875CA | 2 | 2 | 2 | 2 | 2 | 1 | 2 | 1 | 1 | *3 |
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地址:江苏省昆山市昆太路xxxx
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