1. Increased pumping speed
   Compared to ion pump, the cost (including cost of control equipment) per pumping speed 1L/s is approximately 1/2 to 1/3.

2. Light weight and compact
   Compared to ion pump with the same pumping speed, the volume and weight are reduced to 1/5 to 1/10. Therefore, it can be easily attached/removed to/from the pumped system to achieve high pumping speed with minimum space.

Deposition apparatus, electron microscopes, mass spectrometers, vacuum furnaces, various analysis equipment, experimental equipment, pumping equipment and other ultra-high vacuum systems with large gas discharge.