|漏率:||bis 5 x 10-12 mbar l/s|
Helium leak detector with integrated oil-sealed backing pump and 180° sector field mass spectrometer for accurate and reliable leak rate measurements.
Compact and mobile leak detector with a smallest detectable leak rate of 5x10-12 mbarl*l/s. Highest measurement accuracy and reliability, very fast run up time and intuitive handling.
The perfect mobile leak detector for Research & Development, UHV applications, industrial applications or the semiconductor industry. With its small size the PHOENIX is perfectly suited for systems integration.