vat真空阀门

产品分类

热门关键词

联系我们

昆山熙日机械设备有限公司

联系人: 张小姐

手机:(0)13913143077

联系人:李先生

手机:(0)15895662155

邮箱:kssunnyjx@126.com

QQ:1191890920

微信:kssunnyjx

网址:www.leybold-inficon.com

www.xiri-vacuum.com

办公地址:江苏省昆山市长江南路77号

维修地址:江苏省昆山市花桥镇星光工业园2A


Roots Type MU Series for Light Process

您的当前位置: 首 页 >> 产品中心 >> anelva

Roots Type MU Series for Light Process

  • 所属分类:anelva

  • 点击次数:
  • 发布日期:2018/01/20
  • 在线询价
详细介绍

Roots Type MU Series for Light Process

Roots Type MU Series for Light Process
Roots Type Dry Pump
MU100N/300

World smallest, minimum energy level Roots type dry pump for light process.

Roots Type MU Series for Light Process Roots Type Dry Pump MU100N/300

Features

  1. Compact and light weight
    Compact light-weight, high performance pump providing 1660L/min pumping performance with 230mm×450mm (0.1㎡) footprint

  2. Energy saving
    •MU100N power consumption at ultimate pressure: 0.7kW (46% less compared to previous type)
    •Cooling water: 2L/min (43% less compared to previous type)
    •Reduced nitrogen purge consumption with no nitrogen purging required for clean use. (Nitrogen purge required for Ar pumping.)

Applications

Light processes

  • Sputtering

  • Load locks

Specifications

TypeMU100NMU300
Maximum pumping rate (L/min)1,6605,000
Ultimate pressure (Note1) (Pa)1.50.5
Maximum inlet pressureAtmospheric pressure
Maximum pumping-port pressureAtmospheric pressure
Intake flangeNW50
Pumping-port flangeNW25
Cooling waterMaximum supply pressure(MPa)0.5 (gauge pressure) IN-OUT difference: 0.2 or greater
Flow(L/min)2 to 3 (Temperature: 10 to 25℃)
Connection port diameterRc1/4 (with self-sealed coupler)Rc3/8 (with self-sealed coupler)
NitrogenSupply pressure(MPa)0.1 to 0.7 (gauge pressure)
Flow (Note2) (L/min)0 or 50 to 10
Connection port diameter1/4"pipe joint
Power supply voltage3 phase 200 to 220VAC 50/60Hz
Power supply capacity (kVA)4.07.0
Power consumption (Note3) (kW)0.70.9
Operating environment temperature range (℃)5 to 30℃
Weight(kg)60100
Dimensions L×W×H (mm)450×230×275450×230×550

1) Indicates value without nitrogen purge.

2) Nitrogen flow depends on application.

3) Value at ultimate pressure.

Back to Page top


相关标签:   anelva,RootsTypeMUSeriesforLightProcess价格,RootsTypeMUSeriesforLightProcess批发

上一篇:没有了
下一篇:Screw Type SDE Series for Hard Process

最近浏览:

在线客服
分享 一键分享