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POWER Eco Series Cryo Pump

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POWER Eco Series Cryo Pump

  • 所属分类:anelva

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  • 发布日期:2018/01/20
  • 在线询价
详细介绍

POWER Eco Series Cryo Pump

POWER Eco Series Cryo Pump
High performance energy-saving cryo pump with 8 to 22 inch intake diameter

The POWER Eco series cryo pump is a high performance energy saving cryo pump designed to reduce power consumption and cooling water flow.

POWER Eco Series Cryo Pump High performance energy-saving cryo pump with 8 to 22 inch intake diameter

Features

  1. Energy and resource saving
    Power consumption and cooling water reduced by 15 to 70%

  2. Reduced regeneration/startup time
    Less than half of previous product. (compared with our previous product)

  3. Improved pumping performance
    Substantial argon pumping capacity increased 1.5 to 4 times. (compared with our previous product)

Applications

  • Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)

  • Electronic component manufacturing equipment

  • Vacuum evaporation systems

  • Vacuum furnaces, space chambers

  • Accelerators

  • Various high vacuum equipment

Specifications

Pump TypeP-085CP-086CP-086CLP-087CP-106CP-106CLP-126CP-126CLP-127CRemarks
Diameter8inch8inch8inch8inch10inch10inch12inch12inch12inch
ShapeVerticalVerticalHorizontalVerticalVerticalHorizontalVerticalHorizontalVertical
Pumping
speed
(L/S)
Nitrogen1,5001,5001,5001,5002,4002,4004,0004,0004,000
Argon1,3001,3001,3001,3002,0002,0003,2003,2003,200
Hydrogen1,0002,5002,2001,0003,8003,7006,0006,0003,000
Water4,0004,0004,0004,0006,4006,4009,0009,0009,000
Maximum pumping
flow(Pa·m3/s)
1.21.21.11.21.01.00.80.80.8
Maximum gas
instantaneous
tolerance(Pa·m3)
18.018.018.018.018.018.018.018.018.0
Startup time(min)60658060851009510570*1
Regeneration
(heat-up)
time(min)
404045404550455040*1
Startup
regeneration
time(min)
100+α105+α125+α100+α130+α150+α140+α155+α110+α*1
Pumping
capacity
(Pa·m3)
Argon80,00080,00080,000150,000160,000140,000260,000200,000400,000*2
Hydrogen1,3001,8001,6001,3002,0001,8002,4002,2001,600
Ultimate
temperature(K)
15 or less
Ultimate
pressure(Pa)
Approx. 10-7
Maximum heating
temperature(℃)
70
Ambient
temperature
range(℃)
10 to 35
Recommended
maintenance
interval(h)
Within 16,000h
Weight(kg)222222232425293029
Number
of
operable
units
P-421CA3*3*3*3*2*2*2*2*2**3、*4
P-875CA555544444*3
Pump TypeP-128CP-128CLP-160CP-161CP-161CLP-166CP-201CP-206CP-226CRemarks
Diameter12inch12inch16inch16inch16inch16inch20inch20inch22inch
ShapeVerticalHorizontalVerticalVerticalHorizontalVerticalVerticalVerticalVertical
Pumping
speed
(L/S)
Nitrogen4,0004,0008,0008,0007,4008,00013,00013,00017,000
Argon3,2003,2005,5005,5005,0005,5009,0009,00011,000
Hydrogen6,0005,0005,50011,00010,00011,00017,00017,00023,000
Water9,0009,00017,00017,00017,00017,00028,00028,00039,000
Maximum pumping
flow(Pa·m3/s)
2.22.22.22.02.23.51.33.02.7
Maximum gas
instantaneous
tolerance(Pa·m3)
4040505050508080133
Startup time(min)110115709012080150100120*1
Regeneration
(heat-up)
time(min)
707040606060708080*1
Startup
regeneration
time(min)
180+α185+α110+α150+α180+α140+α220+α180+α200+α*1
Pumping
capacity
(Pa·m3)
Argon270,000200,000400,000400,000200,000400,000800,000800,0001,000,000*2
Hydrogen4,0003,5001,6003,4003,0003,4004,5007,5007,500
Ultimate
temperature(K)
15 or less
Ultimate
pressure(Pa)
Approx. 10-7
Maximum heating
temperature(℃)
70
Ambient
temperature
range(℃)
10 to 35
Recommended
maintenance
interval(h)
Within 16,000h
Weight(kg)333450506550606087
Number
of
operable
units
P-421CA11111-1--*4
P-875CA222221211*3


相关标签:   anelva,POWEREcoSeriesCryoPump价格,POWEREcoSeriesCryoPump批发

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