POWER Series Cryo Pump High performance cryo pump having 8 to 12 inch intake diameter (compact)
The POWER series cryo pump is a high performance cryo pump that reduces regeneration/startup time to help increase vacuum equipment productivity and utilization, provides high pumping capacity, excellent pumping performance and improved temperature stability during multi-operation.
Enables safe and high speed regeneration without heater
POWER startup and stability (excellent startup characteristic and temperature stability)
Low vibration Average vibration acceleration is less than 1/10 compared to our previous product.
Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)