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POWER Series Cryo Pump

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POWER Series Cryo Pump

  • 所属分类:anelva

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  • 发布日期:2018/01/20
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详细介绍

POWER Series Cryo Pump

POWER Series Cryo Pump
High performance cryo pump having 8 to 12 inch intake diameter (compact)

The POWER series cryo pump is a high performance cryo pump that reduces regeneration/startup time to help increase vacuum equipment productivity and utilization, provides high pumping capacity, excellent pumping performance and improved temperature stability during multi-operation.

POWER Series Cryo Pump High performance cryo pump having 8 to 12 inch intake diameter (compact)

Features

  1. Enables safe and high speed regeneration without heater

  2. POWER startup and stability (excellent startup characteristic and temperature stability)

  3. Low vibration
    Average vibration acceleration is less than 1/10 compared to our previous product.

Applications

  • Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)

  • Electronic component manufacturing equipment

  • Vacuum evaporation systems

  • Vacuum furnaces, space chambers

  • Accelerators

  • Various high vacuum equipment

Specifications

Pump TypeP-080CP-081CP-081CLP-082CP-083CP-100CLP-101CP-101CLRemarks
Diameter8inch8inch8inch8inch8inch10inch10inch10inch
ShapeVerticalVerticalHorizontalVerticalVerticalHorizontalVerticalHorizontal
Pumping
speed
(L/S)
Nitrogen1,5001,5001,5001,5001,5002,4002,4002,400
Argon1,3001,3001,3001,3001,3002,0002,0002,000
Hydrogen1,0002,5002,2001,0001,0003,0003,8003,700
Water4,0004,0004,0004,0004,0006,4006,4006,400
Maximum pumping
flow(Pa·m3/s)
1.51.21.21.51.51.01.01.0
Maximum gas
instantaneous
tolerance(Pa·m3)
18.018.018.018.018.018.018.018.0
Startup time(min)4550654550807080*1
Regeneration
(heat-up)
time(min)
3030303035403545*1
Startup
regeneration
time(min)
75+α80+α95+α75+α85+α120+α105+α125+α*1
Pumping
capacity
(Pa·m3)
Argon80,00080,00080,000150,000190,000140,000160,000140,000*2
Hydrogen1,3001,8001,6001,3001,3001,3002,0001,800
Ultimate
temperature(K)
15 or less
Ultimate
pressure(Pa)
Approx. 10-7
Maximum heating
temperature(℃)
70
Ambient
temperature
range(℃)
10 to 35
Recommended
maintenance
interval(h)
Within 16,000h
Weight (kg)2222222324252425
Number
of
operable
units
P-421CA11111111*3
P-875CA33333333*3
Pump TypeP-120CP-120CLP-121CP-121CLP-122CRemarks
Diameter12inch12inch12inch12inch12inch
ShapeVerticalHorizontalVerticalHorizontalVertical
Pumping speed(L/S)Nitrogen4,0004,0004,0004,0004,000
Argon3,2003,2003,2003,2003,200
Hydrogen3,6003,0006,0005,0003,000
Water9,0009,0009,0009,0009,000
Maximum pumping flow (Pa·m3/s)1.01.01.01.01.0
Maximum gas instantaneous tolerance(Pa·m3)18.018.018.018.018.0
Startup time(min)60907010060*1
Regeneration(heat-up) time(min)3540405030*1
Startup regeneration time(min)95+α130+α110+α150+α90+α*1
Pumping capacity (Pa·m3)Argon260,000200,000260,000200,000400,000*2
Hydrogen1,6001,4002,4002,2001,600
Ultimate
temperature(K)
15 or less
Ultimate pressure(Pa)Approx. 10-7
Maximum heating temperature(℃)70
Ambient temperature range(℃)10 to 35
Recommended maintenance interval(h)Within 16,000h
Weight (kg)2929293029
Number of operable unitsP-421CA11111*3
P-875CA33333*3


相关标签:   anelva,POWERSeriesCryoPump价格,POWERSeriesCryoPump批发

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