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Combination Pump

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Combination Pump

  • 所属分类:anelva

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  • 发布日期:2018/01/20
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详细介绍

Combination Pump

Combination Pump

Combination pump combines the titanium sublimation pump with the triode ion pump (noble pump) to economically increase pumping speed while maintaining the feature of ion pump which can easily obtain clean ultra high vacuum.

Combination Pump

Features

  1. Increased pumping speed
    Compared to ion pump, the cost (including cost of control equipment) per pumping speed 1L/s is approximately 1/2 to 1/3.

  2. Light weight and compact
    Compared to ion pump with the same pumping speed, the volume and weight are reduced to 1/5 to 1/10. Therefore, it can be easily attached/removed to/from the pumped system to achieve high pumping speed with minimum space.

Applications

Deposition apparatus, electron microscopes, mass spectrometers, vacuum furnaces, various analysis equipment, experimental equipment, pumping equipment and other ultra-high vacuum systems with large gas discharge.

Specifications

400L/s Combination Pump

Pumping rate/Pumping flowSee Fig. 1
Operating pressure range10-1Pa to 10-9Pa
Baking temperatureMAX250℃
WeightApprox. 15kg
Intake flangeφ152ICF flange
Approximate capacity4.5L
Applicable controller922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller
400L/s Combination Pump Specifications

Fig. 1

800L/s Combination Pump

Pumping rate/Pumping flowSee Fig. 2
Operating pressure range10-1Pa to 10-9Pa
Baking temperatureMAX 250℃
WeightApprox. 25kg
Intake flangeφ203ICF flange
Approximate capacityApprox. 7.5L
Applicable controller922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller
800L/s Combination Pump Specifications

Fig. 2

1600L/s Combination Pump

Pumping rate/Pumping flowSee Fig. 3
Operating pressure range10-1Pa to 10-9Pa
Baking temperatureMAX 250℃
WeightApprox. 35kg
Intake flangeInlet flange φ253ICF flange
Approximate capacityApprox. 15.5L
Applicable controller922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller
1600L/s Combination Pump Specifications

Fig. 3


相关标签:   anelva,CombinationPump价格,CombinationPump批发

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