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Excel Pump

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Excel Pump

  • 所属分类:anelva

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  • 发布日期:2018/01/20
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详细介绍

Excel Pump

Excel Pump

Excel pump is a small light pump developed based on the ion pump. It can achieve extreme high vacuum using a pump element that is developed by improving the discharge characteristics at low pressure range, a built-in heater that enables efficient baking, and a built-in NEG (non-evaporative getter).

Excel pump

Features

  1. High pumping performance at UHV and XHV range
    Discharge at low pressure range is improved with the development of a new pump element and vacuum around 10-10Pa is realized with the use of NEG (non-evaporative getter) module.

  2. Highly efficient baking
    Increased efficiency is realized with built-in baking heater and moisture retention cover

  3. Compact and light weight
    40% size reduction (compared to our previous product)

Applications

  • Fully oil free ultra-high vacuum and extreme vacuum pumping systems

  • Electron microscopes, surface analyzers

  • Particle accelerators, nuclear fusion experimental devices, space environmental testing equipment

  • Vacuum retention pump for electron tubes, etc.

Specifications

PumpName125L/s Excel Pump
Type912-7100
Pumping speed(N2gas)125L/s
Operating range (Note 1)10-3 to *10-10Pa *NEG module installed
Ready to start pressure (Note 1)1×10-2Pa or less
CapacityApprox. 10L
Maximum heating temperature250℃(pump shell with magnet removed
may be baked up to 400℃)
Inletφ152ICF
Current input terminal954-7281
Element (replaceable)915-7070 Excel Element (×2)
Magnet912-7005(×1) included
WeightApprox. 48kg

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