Excel pump is a small light pump developed based on the ion pump. It can achieve extreme high vacuum using a pump element that is developed by improving the discharge characteristics at low pressure range, a built-in heater that enables efficient baking, and a built-in NEG (non-evaporative getter).
High pumping performance at UHV and XHV range Discharge at low pressure range is improved with the development of a new pump element and vacuum around 10-10Pa is realized with the use of NEG (non-evaporative getter) module.
Highly efficient baking Increased efficiency is realized with built-in baking heater and moisture retention cover
Compact and light weight 40% size reduction (compared to our previous product)
Fully oil free ultra-high vacuum and extreme vacuum pumping systems
Electron microscopes, surface analyzers
Particle accelerators, nuclear fusion experimental devices, space environmental testing equipment
Vacuum retention pump for electron tubes, etc.
125L/s Excel Pump
Operating range (Note 1)
10-3 to *10-10Pa *NEG module installed
Ready to start pressure (Note 1)
1×10-2Pa or less
Maximum heating temperature
250℃(pump shell with magnet removed may be baked up to 400℃)