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Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

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Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
  • 在线询价
详细介绍

Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

This is a series of most common B-A ionization vacuum gauges with abundant expansion board selection supporting a variety of gauges.

Standard equipped with remote control function and range hold function necessary for process control of vacuum equipment. A type capable of controlling communication with CC-Link is also available.

The M-823HG enables accurate measurement from atmospheric pressure to high vacuum range with a single device.

Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

Features

  1. Automatically switched pressure range.

  2. Pressures and messages are displayed on LCD.

  3. Variety of external control functions enabling fully remote operation.

  4. Standard equipped with two set points.

Applications

  • Automated vacuum equipment pressure measurement

  • Sputtering process pressure measurement and control

  • Multi-chamber system pressure measurement

Specifications

TypeM-723HGM-823HGM-923HG
Measurement ballUGD-1S B-A Gauge BallBRG-1B Wide Range B-A Gauge BallNIG-2F/NIG-2TF
Nude Ion Gauge Ball
Pressure
measurement
range (Pa)
5 range auto switch
10-2, 10-3, 10-4, 10-5, 10-6
7 range auto switch
10-0, 10-1, 10-2, 10-3, 10-4, 10-5, 10-6
8 range auto switch
10-2, 10-3, 10-4, 10-5, 10-6, 10-7, 10-8, 10-9
Measurement
range
switching
Auto switching (range hold possible)
DegasGrid electrical heating methodElectron bombardment method
Filament switchingCan be switched from the front panel or by external control input (excluding M823HG)
Filament protectionTurns off automatically if there is a problem in the fluctuation range of pressure, ion current, or emission current.
Analog outputD/A output (mantissa D/A output, exponent D/A output, combined D/A output)
analogy raw output (electrometer output)
I/O remoteINPUTFilament ON/OFF input,
degas ON/OFF input,
filament inhibit input,
range hold 1 input,
range hold 2 input,
filament switch input,
gauge 1/2 switch input (when using gauge select option)
OUTPUTFilament ON/OFF output,
degas ON/OFF output,
remote/local output,
set point output (2 points),
gauge 1/2 select output (when using gauge selector option),
power ON/OFF output,
filament 1/2 output,
alarm output
Set pointStandard equipped with 2 set points (open collector)
Dimensions (mm)H99×W209×D330
Power requirements100VAC±10%2A, 50/60Hz (also supports 115/200/230VAC)
Weight5.4kg
Standard configurationVacuum gauge main unit (measurement ball and cable are not included)

Dimensions

 Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
0161-80355M-723HGIon GaugeJIS Rack Type、 for UGD-1S Gauge Head21704
0161-80486M-813HGWide Range Ion GaugeJIS Rack Type、 for BRG-1B Gauge Head21728
0161-71445M-923HGUHV Vacuum GaugeJIS Rack Type、 for NIG-2F Gauge Head21734
P13-06804921-303Gauge Selector Box (for M-922HG)Cable for M-922HG (w Cable to Unit 5M・to Gauge 2M)21745
P13-08435721-303Gauge Selector Box (for M-722HG/M-822HG)Cable for M-722HG/M-822HG (w Cable to Unit 5M・to Gauge 2M)21764
H21-01490921-801Rack Mount PanelforM-722HG/M-822HG/M-922HG21765
0161-68604722-TCTC Gauge Board
21487
0161-70465722-BCDBCD Output Boardfor M-722HG/M-822HG/M-922HG w Connecter21483
0161-70423722-CMCM.XTL Gauge Boardfor M-722HG/M-822HG/M-922HG w Connecter21483
P23-04131722-SPBSet Points Boardfor M-722HG/M-822HG/M-922HG w Connecter21480
H21-02971722-232CRS-232C Boardfor M-722HG/M-822HG/M-922HG w Connecter21487
H21-02966722-GPIBRS-232C Boardfor M-722HG/M-822HG/M-922HG w/o Cable21484
9-3428820-901Cable for B-A Gauge (5M)for M-722HG/M-822HG, 5M21645
9-3319820-902Cable for B-A Gauge (10M)for M-722HG/M-822HG, 10M21646
P13-14966820-903Cable for B-A Gauge (15M)for M-722HG/M-822HG, 15M21647
P13-14967820-904Cable for B-A Gauge (20M)for M-722HG/M-822HG, 20M21648
9-3429921-901Cable for Nude Ion Gauge (5M)for M-922HG, 5M21750
P13-14128921-902Cable for Nude Ion Gauge (10M)for M-922HG, 10M21751
P13-14129921-903Cable for Nude Ion Gauge (15M)for M-922HG, 15M21752
P13-14130921-904Cable for Nude Ion Gauge (20M)for M-922HG, 20M21753
0161-36411921-911Bakable Cable for Nude Ion Gauge (5M)for M-922HG, Bakable 5M21754
P13-22893921-912Extention Cable for Nude Ion Gauge (5M)921-911 for Extention , 5M(total 10m)21755
0161-36932921-913Extention Cable for Nude Ion Gauge (10M)921-911 for Extention , 10M(total 15m)21756
0161-36940921-914Extention Cable for Nude Ion Gauge (15M)921-911 for Extention , 15M(total 20m)21757


相关标签:   ANELVA,IonizationVacuumGaugeM-723HG,M-823HG,M-923HG价格,M-923HG批发

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