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M-833HG is a control unit made exclusively for miniature B-A gauges. Optional expansion boards supporting versatile gauge and data output are available. The combination of miniature B-A gauge and TC gauge (option) and the use of auto filament that performs auto gauge switching enables highly accurate vacuum measurement from atmospheric pressure to ultra high vacuum. Best suited for installation on high to ultra high vacuum equipment.
Variety of external control functions enabling fully remote operation.
Standard equipped with two set points.
Highly expandable supporting up to four option boards. (Note: GP-IB option not supported.)
Complies with RoHS and CE marking.
Automated vacuum equipment pressure measurement
Sputtering process pressure measurement and control
Multi-chamber system pressure measurement
General vacuum equipment pressure measurement
Type | M-833HG | |
---|---|---|
Measurement ball | Miniature gauge MG-2 Series | |
Pressure display range | 0.1×10-7 to 9.9×100 Pa | |
Pressure display | Measurement range auto switch | |
Set point | Standard equipped with 2 points (open collector) | |
D/A output | 0 to 10V: Mantissa output, Exponent output 0 to 11V: Combined output or LOG output | |
Analog output (Electron meter output) | When set to APC mode (0.1 to 2.5V) When set to normal mode (0.1 to 1.6V) | |
External control function (Remote control) | INPUT | Filament ON/OFF Degas ON/OFF etc. (6 types of external control functions) |
OUTPUT | 6 types of status signal output | |
Special function | APC compatible: Range hold function Electron meter output function | |
Dimensions and Weight | H99×W209×D330, 1.9kg | |
Power requirements | 100 to 240VAC 100VA or less, 50/60Hz | |
Emission current | 10μA, 100μA, 1mA auto switched or fixed | |
Degas | Grid electrical heating method | |
Filament switching | Key and remote I/O control | |
Filament protection | Over range setting or emission current ±50% variation | |
Standard configuration | Vacuum gauge main unit (measurement ball and cables not included) | |
RoHS, CE marking | Compatible |
Parts Number | Model | Description | Remarks | Code |
---|---|---|---|---|
0161-63816 | M-833HG | Wide Range Ion Gauge | Controller for Miniature Gauge only、w/o Cable / Gauge Head | 21734 |
0161-68604 | 722-TC | TC Gauge Board | 21487 | |
0161-70465 | 722-BCD | BCD Output Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
0161-70423 | 722-CM | CM.XTL Gauge Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
P23-04131 | 722-SPB | Set Points Board | for M-722HG/M-822HG/M-922HG w Connecter | 21480 |
H21-02971 | 722-232C | RS-232C Board | for M-722HG/M-822HG/M-922HG w Connecter | 21487 |
H21-02966 | 722-GPIB | RS-232C Board | for M-722HG/M-822HG/M-922HG w/o Cable | 21484 |
P23-01064 | 831-323 | Gauge Selector Box for MG-2 | for M-832HG, w Cable (to Unit 5M, to Gauge 2M) | 21775 |
H21-03430 | 430-901 | Cable for Miniature B-A Gauge (5M) | for MG-2/2F, Standard Cable | 21672 |
H21-03432 | 430-902 | Cable for Miniature B-A Gauge (10M) | for MG-2/2F | 21673 |
H21-03433 | 430-903 | Cable for Miniature B-A Gauge (15M) | for MG-2/2F | 21674 |
0161-24189 | 430-904 | Cable for Miniature B-A Gauge (20M) | for MG-2/2F | 21675 |
0161-44820 | 430-911 | Bakable Cable for MG-2 (5M) | Maximum Usable Temperature Range 250゚C | 21676 |
0161-44838 | 430-912 | Bakable Cable for MG-2 (10M) | Maximum Usable Temperature Range 250゚C | 21677 |
0161-36966 | 430-913 | Bakable Cable for MG-2 (15M) | Maximum Usable Temperature Range 250゚C | 21678 |
0161-36974 | 430-914 | Bakable Cable for MG-2 (20M) | Maximum Usable Temperature Range 250゚C | 21679 |