vat真空阀门

产品分类

热门关键词

联系我们

昆山熙日机械设备有限公司

联系人: 张小姐

手机:(0)13913143077

联系人:李先生

手机:(0)15895662155

邮箱:kssunnyjx@126.com

QQ:1191890920

微信:kssunnyjx

网址:www.leybold-inficon.com

www.xiri-vacuum.com

办公地址:江苏省昆山市长江南路77号

维修地址:江苏省昆山市花桥镇星光工业园2A


Wide Range Ionization Vacuum Gauge M-833HG

您的当前位置: 首 页 >> 产品中心 >> ANELVA

Wide Range Ionization Vacuum Gauge M-833HG

  • 所属分类:ANELVA

  • 点击次数:
  • 发布日期:2018/01/20
  • 在线询价
详细介绍

Wide Range Ionization Vacuum Gauge M-833HG

Wide Range Ionization Vacuum Gauge M-833HG

M-833HG is a control unit made exclusively for miniature B-A gauges. Optional expansion boards supporting versatile gauge and data output are available. The combination of miniature B-A gauge and TC gauge (option) and the use of auto filament that performs auto gauge switching enables highly accurate vacuum measurement from atmospheric pressure to ultra high vacuum. Best suited for installation on high to ultra high vacuum equipment.

Wide Range Ionization Vacuum Gauge M-833HG

Features

  1. Variety of external control functions enabling fully remote operation.

  2. Standard equipped with two set points.

  3. Highly expandable supporting up to four option boards. (Note: GP-IB option not supported.)

  4. Complies with RoHS and CE marking.

Applications

  • Automated vacuum equipment pressure measurement

  • Sputtering process pressure measurement and control

  • Multi-chamber system pressure measurement

  • General vacuum equipment pressure measurement

Specifications

TypeM-833HG
Measurement ballMiniature gauge MG-2 Series
Pressure display range0.1×10-7 to 9.9×100 Pa
Pressure displayMeasurement range auto switch
Set pointStandard equipped with 2 points (open collector)
D/A output0 to 10V: Mantissa output, Exponent output
0 to 11V: Combined output or LOG output
Analog output
(Electron meter output)
When set to APC mode (0.1 to 2.5V)
When set to normal mode (0.1 to 1.6V)
External control function
(Remote control)
INPUTFilament ON/OFF
Degas ON/OFF
etc. (6 types of external control functions)
OUTPUT6 types of status signal output
Special functionAPC compatible: Range hold function
Electron meter output function
Dimensions and WeightH99×W209×D330, 1.9kg
Power requirements100 to 240VAC
100VA or less, 50/60Hz
Emission current10μA, 100μA, 1mA auto switched or fixed
DegasGrid electrical heating method
Filament switchingKey and remote I/O control
Filament protectionOver range setting or emission current ±50% variation
Standard configurationVacuum gauge main unit (measurement ball and cables not included)
RoHS, CE markingCompatible

Dimensions

 Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
0161-63816M-833HGWide Range Ion GaugeController for Miniature Gauge only、w/o Cable / Gauge Head21734
0161-68604722-TCTC Gauge Board
21487
0161-70465722-BCDBCD Output Boardfor M-722HG/M-822HG/M-922HG w Connecter21483
0161-70423722-CMCM.XTL Gauge Boardfor M-722HG/M-822HG/M-922HG w Connecter21483
P23-04131722-SPBSet Points Boardfor M-722HG/M-822HG/M-922HG w Connecter21480
H21-02971722-232CRS-232C Boardfor M-722HG/M-822HG/M-922HG w Connecter21487
H21-02966722-GPIBRS-232C Boardfor M-722HG/M-822HG/M-922HG w/o Cable21484
P23-01064831-323Gauge Selector Box for MG-2for M-832HG, w Cable (to Unit 5M, to Gauge 2M) 21775
H21-03430430-901Cable for Miniature B-A Gauge (5M)for MG-2/2F, Standard Cable21672
H21-03432430-902Cable for Miniature B-A Gauge (10M)for MG-2/2F21673
H21-03433430-903Cable for Miniature B-A Gauge (15M)for MG-2/2F21674
0161-24189430-904Cable for Miniature B-A Gauge (20M)for MG-2/2F21675
0161-44820430-911Bakable Cable for MG-2 (5M)Maximum Usable Temperature Range 250゚C21676
0161-44838430-912Bakable Cable for MG-2 (10M)Maximum Usable Temperature Range 250゚C21677
0161-36966430-913Bakable Cable for MG-2 (15M)Maximum Usable Temperature Range 250゚C21678
0161-36974430-914Bakable Cable for MG-2 (20M)Maximum Usable Temperature Range 250゚C21679

Back to Page top


相关标签:   ANELVA,WideRangeIonizationVacuumGaugeM-833HG价格,WideRangeIonizationVacuumGaugeM-833HG批发

最近浏览:

在线客服
分享 一键分享