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Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

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Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
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详细介绍

Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

A miniature gauge is a small gauge ball made of metal.

It enables pressure measurement from ultimate pressure to process pressure of sputters (measurement around 1Pa) with a single gauge.

Connects to gauge adapter (O-ring insertion type). (φ15mm, φ18mm)

NW16/25, φ34ICF, and φ70ICF type are available.

Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

Specifications

TypeMG-2MG-2MMG-2I/
NW16,25
MG-2I/
φ34ICF,φ70ICF
MG-2FMG-2/WF
Body materialSUS304
Maximum
pressure
measurement(Note 1)
13Pa1.3×10-1(Note 3)Pa
Minimum
pressure
measurement(Note 2)
Approx. 10-6PaApprox. 10-7PaApprox. 1.0×10-5(Note 4)Pa
Sensitivity0.045Pa-1
FilamentTwo filaments built-in
Filament material: Yttria coated iridium wire
Two filaments built-in
Filament material: Tungsten
Measurement ball capacityApprox. 12cc
Power
power
Filament
Grid degas
2.3W
1.0W
2.5W
1.0W
Degassing methodGrid electrical heating
Attachment methodCan be welded to φ15 gauge adapter or various flangesφ18 gauge adapterNW25, NW16φ34ICF, φ70ICFConnect to φ70ICF flangeCan be welded to φ15 gauge adapter or various flanges

Dimensions

Dimensions

Various flange installation example

Various flange installation example

Parts Number

Parts NumberModelDescriptionRemarksCode
0160-01234MG-2Miniature B-A Gauge HeadConnecter φ15 Type21160
0160-01284MG-2MMiniature B-A Gauge HeadConnecter φ18 Type21162
H21-03193MG-2I/NW16Miniature B-A Gauge Head with NW16
21163
H21-03194MG-2I/NW25Miniature B-A Gauge Head with NW25
21164
H21-03195MG-2I/ICF34Miniature B-A Gauge Head with ICF34
21165
P25-04306MG-2I/ICF70Miniature B-A Gauge Head with ICF70
21166
0160-01268MG-2FMiniature B-A Gauge HeadConnecter φ70ICF Type21161
0160-02222MG-2F/WFMiniature B-A Gauge (Tungsten Type)
21167
89-4367MG-2WFMiniature B-A Gauge HeadTungsten Filament Type、Connecter φ15 Type21170
0161-02640MG-2WF/N25Miniature B-A Gauge Head W filament with NW25Tungsten Filament Type、Connecter φ15 Type21176


相关标签:   ANELVA,MiniatureGaugeMG-2/MG-2M/MG-2FMG-2/WF价格,MiniatureGaugeMG-2/MG-2M/MG-2FMG-2/WF批发

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