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Crystal Gauge M-320XG

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Crystal Gauge M-320XG

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
  • 在线询价
详细介绍

Crystal Gauge M-320XG

Crystal Gauge M-320XG

Enables wide range highly reliable measurement from atmospheric pressure to 1×10-1Pa.

Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.

It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.

Crystal Gauge M-320XG

Features

  1. Wide measurement range
    Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa.

  2. High stability
    Crystal gauge is a vacuum gauge with no source of heat (filament).
    Enables safe handling without affecting process gas.

  3. Compact and ultra-light weight
    The controller fits in the palm of your hand weighing only 200g.

* A-NET Display M-390/M-391 These are displays exclusively made for M-320XG.

* They are single channel support models.

Applications

  • Roughing pump pressure measurement of various vacuum equipment

  • Various process pressure measurement

  • Detection pressure switch for chamber vent, etc.

  • Other pressure measurements from atmospheric pressure to 10-2Pa

Specifications

TypeM-320XG
Measurement ballXG-1 Crystal Gauge Head (exclusive for crystal gauge)
Pressure monitor range1×10-2Pa to atmospheric
Measurement pressure range1×10-1Pa to atmospheric
Gas type selectionsN2, Ar, H2, Air
Analog output
(pressure signal)
0 to 10VDC: Set output format of following items with digit switch
1. Log output
2. Multiple output
3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa)
Remote I/OINPUT1. Set gas type switch with 2 bit signal
2. Zero adjustment
3. ATM setting
OUTPUT2 set point output
Set point2 points (photocoupler output, fixed hysteresis)
Set with digit switch (SP1, SP2 mantissa, exponent)
Operating environment5℃ to 50℃ (including controller)
Gauge head only withstand temperature 150℃ MAX
Zero adjustmentPUSH switch or software adjustment by remote I/O
Full scale adjustmentAdjustment by trimmer
I/O connectorDsub 15P
DisplayLED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green))
Power requirements22 to 33VDC, (maximum power consumption 2W)
Dimensions (mm)72.5H×102W×44.5D (excluding gauge head)
Weight200g (excluding gauge head)
Sensor attaching flangeNW16, NW25, φ34ICF, φ70ICF

Dimensions

 Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
89-2282M-320XGA-NET Crystal Gauge ControllerOnly Controller21560
89-4020M-320XG/N16A-NET Crystal GaugeController + Crytal Gauge (w NW16)21561
89-4021M-320XG/N25A-NET Crystal GaugeController + Crytal Gauge (w NW25)21562
0160-01365M-320XG/C34A-NET Crystal GaugeController + Crytal Gauge (w PY34ICF)21580
0160-01373M-320XG/C70A-NET Crystal GaugeController + Crytal Gauge (w PY70ICF)21581
0160-01357,MM-320XG/VG70A-NET Crystal GaugeController + Crytal Gauge (w PY70VG)21582
H21-03280XG-1/NW16Crystal Gauge Head with NW16
21575
H21-03281XG-1/NW25Crystal Gauge Head with NW25
21576
0161-17920XG-1/ICF34Crystal Gauge Head with PY34ICF
21577
0161-17938XG-1/ICF70Crystal Gauge Head with PY70ICF
21578
0161-44888XG-1/VG70Crystal Gauge Head with PY70VG
21579
89-2314M-390A-NET Display Unitfor M-320XG21563
H21-03614M-391A-NET Display Unitw/o Cable21583
89-2316390-05CRA-NET Cable for Display Unit (for Crystal Gauge 5M)
21565
0161-37475390-03BAA-NET Cable for Display Unit (for Ion Gauge 3M)
21567
0161-37491390-10BAA-NET Cable for Display Unit (for Ion Gauge 10M)
21568
0161-37506390-15BAA-NET Cable for Display Unit (for Ion Gauge 15M)
21569
0161-37514390-20BAA-NET Cable for Display Unit (for Ion Gauge 20M)
21570
0161-37409390-03CRA-NET Cable for Display Unit (for Crystal Gauge 3M)
21571
0161-37425390-10CRA-NET Cable for Display Unit (for Crystal Gauge 10M)
21572
0161-37433390-15CRA-NET Cable for Display Unit (for Crystal Gauge 15M)
21573
0161-37441390-20CRA-NET Cable for Display Unit (for Crystal Gauge 20M)
21574


相关标签:   ANELVA,CrystalGaugeM-320XG价格,CrystalGaugeM-320XG批发

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