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Crystal Ion Gauge M-336MX

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Crystal Ion Gauge M-336MX

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
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详细介绍

Crystal Ion Gauge M-336MX

Crystal Ion Gauge M-336MX

This is a combination gauge using a crystal gauge with excellent repeatability and response for measurement in the low vacuum range and a miniature B-A gauge proven over many years for measurement in the high vacuum range. A single device capable of measuring wide pressure range from atmospheric pressure to ultra-high vacuum.

Crystal Ion Gauge M-336MX

Features

  1. Combination gauge combining crystal gauge with miniature B-A gauge

  2. From ultra-high vacuum to atmospheric pressure

  3. High precision with excellent repeatability in the low vacuum range

Applications

  • Roughing pump and ultimate pressure measurement of vacuum equipment, semiconductor and electronic component manufacturing equipment pressure measurement

Specifications

TypeCrystal Ion Gauge
M-336MX-SP
Type with Set Point
M-336MX-RS
RS485 Type
Pressure measurement range*4×10-8 to 1×10-5(Pa)
Input voltage+20 to 28VDC
Power consumption12W
Analog output0 to 10V-
Set point-
Interface-RS485
I/O connectorD‐sub 9 pin
Maximum cable length300m (1mm2)*1
Protection standardIP40 compatible
Operating temperature range*25 to 50℃
Storage temperature range*2-20 to 70℃ (not operating)
Sensor TypeMX-1
Sensor material (main component)Filament: Y2O3/Ir, Case:SUS304
Dimensions (mm)149×70×50 (NW25)
Flange shapeNW16, NW25, NW40, φ70ICF
Protection standardIP40
RoHS, CE markingCompatible

Dimensions

 Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
0160-06797M-336MX-SP/N16Crystal Ion Gaugew NW16 Flange22545
0160-06810M-336MX-SP/N25Crystal Ion Gaugew NW25 Flange22546
0160-07206M-336MX-SP/N40Crystal Ion Gaugew NW40 Flange22547
0160-06828M-336MX-SP/C70Crystal Ion Gaugew φ70ICF Flange22548
0160-06836M-336MX-SP/N16Crystal Ion Gauge(RS485)w NW16 Flange22549
0160-06844M-336MX-SP/N25Crystal Ion Gauge(RS485)w NW25 Flange22550
0160-07963M-336MX-SP/N40Crystal Ion Gauge(RS485)w NW40 Flange22551
0160-06852M-336MX-SP/C70Crystal Ion Gauge(RS485)w φ70ICF Flange22552
0161-14825MX-1/N16Crystal Ion Gauge Head(336MX)w NW16 Flange22559
0161-14752MX-1/N25Crystal Ion Gauge Head(336MX)w NW25 Flange22560
0161-14689MX-1/N40Crystal Ion Gauge Head(336MX)w NW40 Flange22561
0161-14647MX-1/C70Crystal Ion Gauge Head(336MX)w φ70ICF Flange22562

附件

vac_detail01 (1).pdf


相关标签:   ANELVA,CrystalIonGaugeM-336MX价格,CrystalIonGaugeM-336MX批发

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