This is a transducer vacuum series ion gauge. Ion gauge (hot cathode ionization vacuum gauge) is an excellent vacuum gauge with good repeatability and linearity and wide pressure measurement range. It uses a proven miniature gauge (MG-2I) as sensor.
Wide pressure measurement range From 10-7Pa to 10Pa, capable of measuring low vacuum below the sputtering process without sacrificing the ultra high vacuum end characteristic.
High response analog output Excellent response with analog signal output of pressure value within 100ms to enable use in process pressure control.
Four emission current setting modes Selectable according to application to improve filament life during use in high pressure range.
Production use vacuum equipment pressure measurement