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Ion Gauge M-311HG

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Ion Gauge M-311HG

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
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详细介绍

Ion Gauge M-311HG

Ion Gauge M-311HG

This is a transducer vacuum series ion gauge. Ion gauge (hot cathode ionization vacuum gauge) is an excellent vacuum gauge with good repeatability and linearity and wide pressure measurement range. It uses a proven miniature gauge (MG-2I) as sensor.

Ion Gauge M-311HG

Features

  1. Wide pressure measurement range
    From 10-7Pa to 10Pa, capable of measuring low vacuum below the sputtering process without sacrificing the ultra high vacuum end characteristic.

  2. High response analog output
    Excellent response with analog signal output of pressure value within 100ms to enable use in process pressure control.

  3. Four emission current setting modes
    Selectable according to application to improve filament life during use in high pressure range.

Applications

  • Production use vacuum equipment pressure measurement

  • Semiconductor sputtering equipment pressure measurement

  • Various vacuum equipment

Options

  • Display equipment supporting the series is available.
    Large digital LCD for easy viewing.
    Significantly improved operability.
    Select between 1ch type or 3ch type according to your needs.

Specifications

TypeIon Gauge
M-311HG‐SPM-311HG‐RS
Pressure measurement range1×10-7 to 10Pa
Input voltage20 to 28VDC
Power consumption12W
Analog output0 to 10 V-
Set point2 point relay output
Interface-RS485
I/O connectorDsub-9 (Male)
Maximum cable length200m(1mm2)
Operating temperature range5 to 50℃
Storage temperature range-20 to 70℃
Sensor TypeMiniature B-A Gauge (MG-2I Series)
Sensor material (main component)Filament: Y2O3/Ir, Case:SUS304
Dimensions (mm)110×70×50
Flange shapeNW16, NW25, ICF34, ICF70
Protection standardIP40
RoHS, CE markingCompatible

Dimensions

Ion Gauge Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
0161-78390M-311HG-SP/N16Ion Gaugew NW16 Flange22670
0161-78405M-311HG-SP/N25Ion Gaugew NW25 Flange22671
0161-78413M-311HG-SP/C70Ion Gaugew φ70ICF Flange22672
0161-78421M-311HG-SP/C34Ion Gaugew φ34ICF Flange22673
0161-78439M-311HG-RS/N16Ion Gauge(RS485)w NW16 Flange22674
0161-78447M-311HG-RS/N25Ion Gauge(RS485)w NW25 Flange22675
0161-78455M-311HG-RS/C70Ion Gauge(RS485)w φ70ICF Flange22676
0161-78463M-311HG-RS/C34Ion Gauge(RS485)w φ34ICF Flange22677

附件

vac_detail01 (1).pdf


相关标签:   ANELVA,IonGaugeM-311HG价格,IonGaugeM-311HG批发

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