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Capacitance Diaphragm Gauge M-342DG

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Capacitance Diaphragm Gauge M-342DG

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
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详细介绍

Capacitance Diaphragm Gauge M-342DG

New Product  Capacitance Diaphragm Gauge M-342DG

The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.

This is achieved using a newly developed small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.

Capacitance Diaphragm Gauge M-342DG

Features

  • High precision, stable pressure measurement 
    ・Excellent zero point stability. 
    ・Has low temperature dependence providing excellent stability without the need of a temperature 
       adjustment mechanism. 
    ・Excellent anti-vibration noise performance.

  • Compact and low power consumption 
    ・200g, W46mm × H49mm × L70mm compact, lightweight.*1 
    ・Power consumption 0.5W. 

    *1:Size and weight of the coupling NW16 specifications

Applications


  • Supports a wide range of general industy applications such as medical and food in addition to semiconductor manufacturing equipment, panel display munufacturing equipment, and other vacuum equipment.*2 



  •   *2:Not suitable for applications where corrosive gas is used. 


  •        Please consult us for details.

Specifications

TypeM-342DG
-1D-1N-11-12-13
Full scale pressure(Pa) 13.33 133.31.333k13.33k133.3k
                              (Torr)0.11101001000
Accuracy(% of reading)0.20(at 23℃)
Zero temperature
drift coefficient(% of F.S./℃)
0.010.0050.002
Span temperature
drift coefficient(% of reading/℃)
0.010.005
Resolution(% of Full-scale)0.010.005
Lowest Reading(% of Full-scale)0.01
Lowest Suggested Pressure for
Reading(% of Full-scale)
0.05
Lowest Suggested Pressure for
Control(% of Full-scale)
0.5
Response time(msec)10030
pressure limit(Pa)200 kPa(absolute pressure) However, 130 kPa(absolute pressure)for
M-342DG-1D(for NW16 & NW25, inner area must not be at
positive pressure)
Input voltage(VDC)+13.5~26.4
Power consumtion(W)0.5 or less
Signal output(VDC)0 to 10
Operating temperature(℃)0 to 50
Storage temperature(℃)-20 to 70(not operating)
Maximum cable length(m)100(0.3mm2)
Zero points adjustment methodspush switch,remote input
Connector typeD-sub 9 pin male(mating screw:#4-40inch)
Materials exposed to vacuumSi,Glass,SUS304,sus316,Fluorine Rubber
Flange shapeNW16,NW25,8-VCR,φ70ICF
Degree of protectionIP40
StandardsLow Voltage Directive, EMC Directive, RoHS Directive
Security Export Control RegulationNot applicable
DisplayM-601GC(1ch)、M-603GC(3c)

Dimensions

Capacitance Diaphragm Gauge M-342DG

Parts Number

Parts NumberModelDescriptionRemarksCode
0160-12049M-341DG-1D-N16Capacitance Gauge(13.3Pa)Coupling: NW1622735
0160-12057M-341DG-1D-N25Coupling: NW2522736
0160-12065M-341DG-1D-C70Coupling: φ70ICF22737
0160-12073M-341DG-1D-VCRCoupling: 8-VCR female22738
0160-11645M-341DG-1N-N16Capacitance Gauge(133Pa)Coupling: NW1622710
0160-11653M-341DG-1N-N25Coupling: NW2522711
0160-11661M-342DG-1N-C70Coupling: φ70ICF22712
0160-11679M-342DG-1N-VCRCoupling: 8-VCR female22713
0160-11459M-342DG-11-N16Capacitance Gauge(1.33kPa)Coupling: NW1622715
0160-11467M-342DG-11-N25Coupling: NW2522716
0160-11475M-342DG-11-C70Coupling: φ70ICF22717
0160-11483M-342DG-11-VC8Coupling: 8-VCR female22718
0160-11140M-342DG-12-N16Capacitance Gauge(13.3kPa)Coupling: NW1622720
0160-11158M-342DG-12-N25Coupling: NW2522721
0160-11077M-342DG-12-C70Coupling: φ70ICF22722
0160-11166M-342DG-12-VC8Coupling: 8-VCR female22723
0160-11093M-342DG-13-N16Capacitance Gauge(133kPa)Coupling: NW1622725
0160-11108M-342DG-13-N25Coupling: NW2522726
0160-11116M-342DG-13-C70Coupling: φ70ICF22727
0160-11124M-342DG-13-VC8Coupling: 8-VCR female22728

附件

vac_detail18_2 (1).pdf


相关标签:   ANELVA,CapacitanceDiaphragmGaugeM-342DG价格,CapacitanceDiaphragmGaugeM-342DG批发

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