The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.
This is achieved using a newly developed small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.
High precision, stable pressure measurement ・Excellent zero point stability. ・Has low temperature dependence providing excellent stability without the need of a temperature adjustment mechanism. ・Excellent anti-vibration noise performance.
Compact and low power consumption ・200g, W46mm × H49mm × L70mm compact, lightweight.*1 ・Power consumption 0.5W.
*1:Size and weight of the coupling NW16 specifications
Supports a wide range of general industy applications such as medical and food in addition to semiconductor manufacturing equipment, panel display munufacturing equipment, and other vacuum equipment.*2
*2:Not suitable for applications where corrosive gas is used.
Please consult us for details.
Full scale pressure(Pa)
Accuracy(% of reading)
Zero temperature drift coefficient(% of F.S./℃)
Span temperature drift coefficient(% of reading/℃)
Resolution（％ of Full-scale）
Lowest Reading（％ of Full-scale）
Lowest Suggested Pressure for Reading（％ of Full-scale）
Lowest Suggested Pressure for Control（％ of Full-scale）
200 kPa(absolute pressure) However, 130 kPa(absolute pressure)for M-342DG-1D(for NW16 & NW25, inner area must not be at positive pressure)
0.5 or less
0 to 10
0 to 50
-20 to 70(not operating)
Maximum cable length(m)
Zero points adjustment methods
push switch,remote input
D-sub 9 pin male(mating screw:#4-40inch)
Materials exposed to vacuum
Degree of protection
Low Voltage Directive, EMC Directive, RoHS Directive