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Quadrupole Mass Spectrometers

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Quadrupole Mass Spectrometers

  • 所属分类:ANELVA

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  • 发布日期:2018/01/20
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详细介绍

Quadrupole Mass Spectrometers

New Product  Quadrupole Mass Spectrometer(Process Gas Monitor)  M-080QA-HPM

M-080QA-HPM is a quadrupole mass spectrometer covering wide pressure range of 10-9Pa∼1.3Pa.

Unique Technology allows the M-080QA to operate in both pressure area of High vaccume and Sputtering process pressure.

M-080QA-HPM can be used to reduce defect rate in production by monitoring the gases of process chambers to find potential problems, such as impurities gas, leakage, etc.

Quadrupole Mass Spectrometer(Process Gas Monitor) M-080QA-HPM

Features

  1. Seamless measurement from process pressure(1.3Pa) to ultrahigh vacuum

  2. Detecting H2 with high sensitivity in deposition process

  3. Long maintenance cycle and low running cost

  4. Detecting problems in production with various alarm functions

Applications

  • Quality control in deposition process

  • Residual gas analysis

  • Leak check

Specifications

ModelM-080QA-HPM
Basic
performance
Measurement mass range1 to 80amu
Operating pressure1.3Pa or less
Minimum Detection Limits5ppm(Without H2), H2:100ppm
Sensitivity
(N2)
FC7.5×10-9A/Pa or greater
SEM7.5×10-5A/Pa or greater
Resolution<1 amu @10% of peak height
SpecificationsFilamentYttria coated iridium×1
Baking temperature250℃(Analyzer tube only)
Connection flangeφ70ICF
Rated input voltage100V to 240VAC
WeightAnalyzer tube2.2kg
Controller2.1kg
Communication interfaceRS-232C/485
SoftwareQUADVISION3 / compatible with Windows10

附件

ma_detail05.pdf


相关标签:   ANELVA,QuadrupoleMassSpectrometers价格,QuadrupoleMassSpectrometers批发

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