It is a robust cold cathode gauge that does not use hot filament.
Stable pressure measurement from high vacuum to ultra-high vacuum is realized.
Widely applicable for vacuum measurements from 1Pa to ultra-high vacuum
･vacuum evaporation, sputtering, ion implantation, MBE
･SEM, SIMS, AES, XPS, surface/gas analysis, mass spectrometry
･aneal, dissolution, soldering, reflow, electron beam welding
|Type||Cold Cathode Gauge|
Type with Set Point
|Pressure measurement range||1×10-7 to 1×100(Pa)|
|Input voltage||+15 to 30VDC|
|Analog output||0 to 10V||-|
|Set point||2 contact output (DC30V, 1A)|
|I/O connector||D-sub 9 pin (available with conversion connector)|
|Maximum cable length||300m (1mm2)*1|
|Operating temperature range||5 to 55℃|
|Storage temperature range||-20 to 70℃ (not operating)|
|Sensor material (main component)||Filament: W, Electrode: Mo, Insulator: Al2O2, Case: SUS304|
|Dimensions (mm)||50(W)×50(D)×110(L) (NW25)|
|Flange shape||NW25, NW40, φ70ICF|
|Protection standard||RoHS, CE, IP40|
*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.