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Cold Cathode Gauge M-370CG

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Cold Cathode Gauge M-370CG

  • 所属分类:ANELVA

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  • 发布日期:2018/01/13
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详细介绍

Cold Cathode Gauge M-370CG

It is a robust cold cathode gauge that does not use hot filament.
Stable pressure measurement from high vacuum to ultra-high vacuum is realized.

Cold Cathode Gauge M-370CG

RoHS

CE

Features

  1. Excellent measurement stability
    Reducing measurement stop due to undischarge and fluctuation of pressure indication value

  2. Good startability under high vacuum
    Eliminating undischarge and discharge delay

Applications

Widely applicable for vacuum measurements from 1Pa to ultra-high vacuum
・vacuum evaporation, sputtering, ion implantation, MBE
・SEM, SIMS, AES, XPS, surface/gas analysis, mass spectrometry
・aneal, dissolution, soldering, reflow, electron beam welding
・accelerator, cyclotron

Specifications

TypeCold Cathode Gauge
M-370CG-SP
Type with Set Point
M-370CG-RS
RS485 Type
Pressure measurement range1×10-7 to 1×100(Pa)
Input voltage+15 to 30VDC
Power consumption2.4W
Analog output0 to 10V-
Set point2 contact output (DC30V, 1A)
Interface-RS485
I/O connectorD-sub 9 pin (available with conversion connector)
Maximum cable length300m (1mm2)*1
Operating temperature range5 to 55℃
Storage temperature range-20 to 70℃ (not operating)
Sensor TypeCC1
Sensor material (main component)Filament: W, Electrode: Mo, Insulator: Al2O2, Case: SUS304
Dimensions (mm)50(W)×50(D)×110(L) (NW25)
Flange shapeNW25, NW40, φ70ICF
Protection standardRoHS, CE, IP40

*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.

Dimensions

Cold Cathode Gauge M-370CG Dimensions

Parts Number

Parts NumberModelDescriptionRemarksCode
0160-12811M-370CG-SP/N25Cold Cathode GaugeWith NW25 Flange22806
0160-12829M-370CG-SP/N40Cold Cathode GaugeWith NW40 Flange22807
0160-12837M-370CG-SP/C70Cold Cathode GaugeWith φ70ICF Flange22808
0160-12845M-370CG-RS/N25Cold Cathode Gauge (RS485)With NW25 Flange22809
0160-12853M-370CG-RS/N40Cold Cathode Gauge (RS485)With NW40 Flange228010
0160-12861M-370CG-RS/C70Cold Cathode Gauge (RS485)With φ70ICF Flange22811
0162-24379-M-361CP/370CG Maintenance kitPole piece, Mesh22790


相关标签:   ANELVA,ColdCathodeGaugeM-370CG价格,ColdCathodeGaugeM-370CG批发

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