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thyrcont图拉特真空计VSH88DL

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thyrcont图拉特真空计VSH88DL

  • 所属分类:Smartline数字规系列

  • 点击次数:
  • 发布日期:2018/01/07
  • 在线询价
详细介绍

QQ图片20180107152039.pngthyrcont图拉特真空计VSH88DL 

Thyracont-Smartline-Vakuumtransmitter-VSH88DL-3112-16-DL.jpg

VSH88DL Vacuum Transducer ● DN40KF ● LCD display

The digital combination vacuum transducer VSH (Pirani/hot cathode) with integrated display measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.

描述

  • Wide range sensor Pirani / Bayard Alpert

  • Pirani with extended range allows operation of hot cathode at
    lower pressure and increases lifetime

  • Excellent accuracy and repeatability

  • Bayard-Alpert with blowing resistant, yttrium coated double filament,
    insensitive against inrush of air

  • Digital RS485 interface and analog output signal 1.219-8.6 V

  • Automatic baud rate detection 9.6 kBd to 115 kBd

  • Two independent, potential-free relay switch points

  • With large, integrated LCD display with background illumination

  • Easily replaceable sensor heads with stored calibration data

应用

  • Coating plants and vapor deposition

  • Sputtering plants

  • Analysis technology

  • Measuring and controlling in the fine and ultrahigh vacuum range

  • Vacuum furnaces

  • Process engineering

  • Space simulation chambers

技术参数

WEIGHT0.555 kg
DIMENSIONS4.8 x 6.9 x 1.46 cm
MEASURING PRINCIPLE

Pirani / Bayard Alpert, depending on gas type

MATERIALS IN CONTACT WITH VACUUM

Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass

MEASUREMENT RANGE

1000 – 5e-10 mbar (750 – 5e-10 Torr), max. overpressure 4 bar abs.

ACCURACY

10 – 1e-8 mbar: < 10 % from reading, 1000 – 10 mbar: < 30 % from reading

REPEATABILITY

±2 % (10 – 1e-2 mbar), 5% (1e-2 – 1e-8 mbar)

RESPONSE TIME

< 200 ms (2 s while switching BA emission current)

EMISSION CURRENT

Automatic switching 10 µA, 100 µA, 1 mA, 2 mA

DEGAS

Ohmic heating of the anode

POWER SUPPLY

20 – 30 VDC

ELECTRICAL CONNECTION

SubD 15pol., male, lockable

POWER CONSUMPTION

Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD

OPERATING TEMPERATURE

+5…+60°C

STORAGE TEMPERATURE

-40…+65°C

MAX. BAKE OUT TEMPERATURE

180°C at the flange (electronic detached)

OUTPUT SIGNAL

0 – 10 VDC, measuring range 1.219 – 8.6 VDC, log., 0.6 V/decade load resistor > 10k W

SERIAL INTERFACE

RS485: 9.6 kBd to 115 kBd, address switch 1 – 16

SWITCH POINT

2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA

VACUUM CONNECTION

DN 40 ISO-KF

PROTECTION CLASS

IP40

vshe.pdf

man_vsh-de-en-171005-1.pdf


相关标签:     Smartline数字规系列,thyrcont图拉特真空计VSH88DL价格,thyrcont图拉特真空计VSH88DL批发

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