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thyrcont图拉特真空计VSM79E

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thyrcont图拉特真空计VSM79E

  • 所属分类:Smartline数字规系列

  • 点击次数:
  • 发布日期:2018/01/07
  • 在线询价
详细介绍

QQ图片20180107152039.pngthyrcont图拉特真空计VSM79E 

Thyracont-Smartline-Vakuumtransmitter-VSM79D-3080-84-D-E1.jpg

VSM79E Vacuum Transducer ● DN40CF-F ● EtherCAT

The digital combination transducer VSM (Pirani/cold cathode) with EtherCAT interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.

描述

  • Wide range sensor Pirani / cold cathode

  • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime

  • Robust sensor design, insensitive against inrush of air

  • Digital RS485 interface and EtherCAT

  • Automatic baud rate detection 9.6 kBd to 115 kBd

  • Two independent, potential-free relay switch points

  • Easily replaceable sensor heads with stored calibration data


应用

  • Mass spectrometry

  • Coating plants and vapor deposition

  • Measuring and controlling in fine and ultrahigh vacuum

  • Process engineering

  • Sputtering plants

  • Vacuum furnaces

技术参数

WEIGHT0.555 kg
DIMENSIONS6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE

Pirani / inverted magnetron, both depending on gas type

MATERIALS IN CONTACT WITH VACUUM

Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic

MEASUREMENT RANGE

1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.

ACCURACY

10 – 2e-3 mbar: < 10 % from reading, 1000 - 10 mbar: < 30 % from reading, 2e-3 mbar - 1e-8 mbar: < 25% from reading

REPEATABILITY

10 – 1e-2 mbar: Approx.. ±2% from reading 1e-2 – 1e-8 mbar: Approx.. ±7% from reading

RESPONSE TIME

200 ms (1s for activating the cold cathode)

CATHODE VOLTAGE

Max. 2,5 kV

POWER SUPPLY

20 – 30 VDC

ELECTRICAL CONNECTION

M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol.

POWER CONSUMPTION

Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD

OPERATING TEMPERATURE

+5…+60°C

STORAGE TEMPERATURE

-40…+65°C

MAX. BAKE OUT TEMPERATURE

160°C at flange (electronic detached)

SERIAL INTERFACE

RS485: 9.6 kBd to 115 kBd, address switch 1 – 16

SWITCH POINT

2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA

VACUUM CONNECTION

DN 40 CF-F

PROTECTION CLASS

IP54

vsme.pdf

man_vsm-de-en-171005.pdf


相关标签:     Smartline数字规系列,thyrcont图拉特真空计VSM79E价格,thyrcont图拉特真空计VSM79E批发

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