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thyrcont图拉特真空计VSM77D

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thyrcont图拉特真空计VSM77D

  • 所属分类:Smartline数字规系列

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  • 发布日期:2018/01/07
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详细介绍

QQ图片20180107152039.pngthyrcont图拉特真空计VSM77D

Thyracont-Smartline-Vakuumtransmitter-VSM77DL-3075-79-DL.jpg

VSM77D Vacuum Transducer ● DN25KF

The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.

描述

  • Wide range sensor Pirani / cold cathode

  • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime

  • Robust sensor design, insensitive against inrush of air

  • Digital RS485 interface and analog output signal 1.819-8.6 V

  • Automatic baud rate detection 9.6 kBd to 115 kBd

  • Two independent, potential-free relay switch points

  • Easily replaceable sensor heads with stored calibration data

应用

  • Mass spectrometry

  • Coating plants and vapor deposition

  • Measuring and controlling in fine and ultrahigh vacuum

  • Process engineering

  • Sputtering plants

  • Vacuum furnaces


技术参数

WEIGHT0.555 kg
DIMENSIONS6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE

Pirani / inverted magnetron, both depending on gas type

MATERIALS IN CONTACT WITH VACUUM

Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic

MEASUREMENT RANGE

1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.

ACCURACY

10 – 2e-3 mbar: <10 % from reading, 1000 - 10 mbar: <30 %from reading, 2e-3 mbar - 1e-8 mbar: <25% from reading

REPEATABILITY

10 – 1e-2 mbar: Approx.. ±2% from reading 1e-2 – 1e-8 mbar: Approx.. ±7% from reading

RESPONSE TIME

200 ms (1s for activating the cold cathode)

CATHODE VOLTAGE

Max. 2,5 kV

POWER SUPPLY

20 – 30 VDC

ELECTRICAL CONNECTION

SubD 15pol., male, lockable

POWER CONSUMPTION

Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD

OPERATING TEMPERATURE

+5…+60°C

STORAGE TEMPERATURE

-40…+65°C

MAX. BAKE OUT TEMPERATURE

160°C at flange (electronic detached)

OUTPUT SIGNAL

0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm

SERIAL INTERFACE

RS485: 9.6 kBd to 115 kBd, address switch 1 – 16

SWITCH POINT

2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA

VACUUM CONNECTION

DN 25 ISO-KF

PROTECTION CLASS

IP40

man_vsm-de-en-171005.pdf

vsme.pdf


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