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thyrcont图拉特真空计VSR54E

thyrcont图拉特真空计VSR54E

  • 所属分类:Smartline数字规系列
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  • 发布时间:2018-01-07 17:13:22
  • 产品概述

QQ图片20180107152039.pngthyrcont图拉特真空计VSR54E

VSR54E Vacuum Transducer ● DN16CF-F ● EtherCAT

Thyracont-Smartline-Vakuumtransmitter-VSR54E-3055-59.jpg

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer with EtherCAT interface offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.

描述

  • Wide measuring range due to combination sensor piezo / Pirani

  • High accuracy and optimal resolution over the whole measuring range

  • Excellent reproducibility and long term stability

  • Digital RS485 interface and EtherCAT

  • Automatic baud rate detection 9.6 kBd to 115 kBd

  • Two independent, potential-free relay switch points

  • Easily replaceable sensor heads with stored calibration data

应用

  • Load locks

  • Analysis technology

  • Coating plants

  • Vacuum furnaces

  • Leakages tests

  • Operational control of roughing pumps

  • Process engineering

技术参数

WEIGHT0.220 kg
DIMENSIONS6.9 x 4.8 x 10.9 cm
MEASURING PRINCIPLE

Membran piezoresistiv / Pirani

MATERIALS IN CONTACT WITH VACUUM

Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass

MEASUREMENT RANGE

1200 – 1e-4 mbar (900 – 1e-4 Torr), max. overpressure 4 bar abs.

ACCURACY

1200 – 10 mbar: ±0.3% full scale 10 – 2e-3 mbar: ±10% from reading

REPEATABILITY

1200-10 mbar: ±0,1 % full scale, 10-2e-3 mbar: ±2% from reading

REACTION TIME

1200 – 10 mbar: < 30ms (piezo) 10 – 2e-3 mbar: < 100 ms (Pirani)

POWER SUPPLY

20 – 30 VDC

ELECTRICAL CONNECTION

M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol.

POWER CONSUMPTION

2.5 W, additionally 0.8 W for EtherCAT / relays /LCD

OPERATING TEMPERATURE

+5…+60°C (rel. humidity max . 80% at 30°C noncondensing)

STORAGE TEMPERATURE

-40…+65°C

MAX. BAKE OUT TEMPERATURE

125°C at the flange

SERIAL INTERFACE

RS485: 9.6 kBd to 115 kBd, address switch 1 – 16

SWITCH POINT

2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA

VACUUM CONNECTION

DN 16 CF-F

PROTECTION CLASS

IP54


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