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PSG5xx 大气压至中真空真空计

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PSG5xx 大气压至中真空真空计

  • 所属分类:真空计

  • 点击次数:
  • 发布日期:2018/01/04
  • 在线询价
详细介绍

PSG5xx 大气压至中真空真空计

PSG50x tiba29.png

 

INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型标准真空计采用当今市场上最先进的数字皮拉尼技术。 不锈钢传感器单元坚固耐用,结构设计紧凑,适用于半导体系统和标准应用,例如前级真空管。

益处

  • 轻松一键调节 ATM 和 HV

  • 节省空间的坚固设计

  • 铝质壳体

  • 可在任意方向安装

  • 不锈钢测量单元,带金属密封馈入装置

  • 便于集成的对数信号输出

  • 螺纹接头,具有 10 巴绝对过压能力

  • 250 °C 烘烤型

  • 在腐蚀应用中可选购镍丝

  • 陶瓷馈入装置,适用于腐蚀性极强的应用 (PSG510 & PSG512)

  • 可选设定点

  • RoHS 合规

典型应用

  • 高真空电离真空计控制

  • 前级真空压力监控

  • 真空系统中的安全电路

  • 高真空和低真空范围内的一般真空测量和控制

规格

类型PSG500 tungstenPSG500-S tungsten, setpointsPSG502-S nickel, setpointsPSG510-S tungsten, setpoints, ceramic feedthroughsPSG512-S nickel, setpoints, ceramic feedthroughs
测量原则
thermal conductance according to Piranithermal conductance according to Piranithermal conductance according to Piranithermal conductance according to Piranithermal conductance according to Pirani
精度 (N2)




1 x 10-3… 100 毫巴% of reading±15%±15%±15%±15%±15%
5 x 10-4… 1 x 10-3 毫巴% of reading±50%±50%±50%±50%±50%
100 … 1000 毫巴% of reading±50%±50%±50%±50%±50%
可重复性(空气)




1 x 10-3… 100 毫巴% of reading2%2%2%2%2%
输出信号(测量信号)




电压范围V0 … +10.30 … +10.30 … +10.30 … +10.30 … +10.3
测量范围V+1.9 … +10.0+1.9 … +10.0+1.9 … +10.0+1.9 … +10.0+1.9 … +10.0
测量范围(空气、O2、CO、N2mbar5 x 10-4 to 10005 x 10-4 to 10005 x 10-4 to 10005 x 10-4 to 10005 x 10-4 to 1000
设定点




设定点数量
none2222
设置范围mbar2 x 10-3 … 5002 x 10-3 … 5002 x 10-3 … 5002 x 10-3 … 500
滞后% of reading10% above lower threshold10% above lower threshold10% above lower threshold10% above lower threshold
继电器触点30303030
继电器触点: 转换时间ms<20<20<20<20
电源电压




真空计上V (dc)+14 …+30+14 …+30+14 …+30+14 …+30+14 …+30
波纹V (p-p)≤1≤1≤1≤1≤1
电压与压强
logarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decadelogarithmic 1.286 Volts per decade
内部容积




DN 16 ISO-KF,DN 16 CF-R,7/16-20 UNFcm³ (in.³)1.5 (0.092)1.5 (0.092)1.5 (0.092)1.5 (0.092)1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R 长管cm³ (in.³)10 (0.61)10 (0.61)10 (0.61)10 (0.61)10 (0.61)
1/8'' NPT,4 VCR,8 VCR,1/2'' 管cm³ (in.³)2 (0.122)2 (0.122)2 (0.122)2 (0.122)2 (0.122)
容许温度




运行°C+5 … +60+5 … +60+5 … +60+5 … +60+5 … +60
真空连接 (1)°C80 / 250 (2)80 / 250 (2)80 / 250 (2)80 / 250 (2)80 / 250 (2)
贮存°C-20 … +65-20 … +65-20 … +65-20 … +65-20 … +65
重量




DN 16 ISO-KF,7/16-20 UNFg8080808080
DN 16 CF-R,4 VCRg100100100100100
1/8'' NPT,1/2'' 管g7070707070
8 VCR,DN 16 ISO-KF 长管g130130130130130
DN 16 CF-R 长管g140140140140140
错误信号V0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)0 … +0.5 (filament rupture)
输出电阻2 x 4.72 x 4.72 x 4.72 x 4.72 x 4.7
最小负载电阻kΩ10, short-circuit proof10, short-circuit proof10, short-circuit proof10, short-circuit proof10, short-circuit proof
反应时间ms8080808080
真空计识别kΩ27.0, referenced to supply common27.0, referenced to supply common27.0, referenced to supply common27.0, referenced to supply common27.0, referenced to supply common
调整
one tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustmentone tactile switch for ATM and HV adjustment
电流消耗mA<500 (max. starting current)<500 (max. starting current)<500 (max. starting current)<500 (max. starting current)<500 (max. starting current)
功耗W≤1≤1≤1≤1≤1
电气连接
FCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, maleFCC 68 / RJ45 appliance connector, 8 poles, male
传感器电缆
8 poles plus shielding8 poles plus shielding8 poles plus shielding8 poles plus shielding8 poles plus shielding
电缆长度m≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)≤100 (8 x 0.14 mm2)
暴露于真空的材料
glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
单丝
WWNiWNi
容许压力bar (absolute)10, limited to inert gases10, limited to inert gases10, limited to inert gases10, limited to inert gases10, limited to inert gases
安装定位
anyanyanyanyany
保护等级
IP40IP40IP40IP40IP40

(1) 水平安装方向

(2) 长管

零件号

PSG500 tungsten
零件号明细
350-060皮拉尼真空计
350-061PSG500 1/8" NPT
350-062PSG500规管
350-063PSG500 1/2" Tube
350-064PSG500 8-VCR (1/2")
350-065PSG500 4-VCR (1/4")
350-066PSG500 7/16-20 UNF
350-067PSG500 DN 16 ISO-KF, ext. body
350-068PSG500 DN 16 CF-R, ext. body
PSG500-S tungsten, setpoints
零件号明细
350-080PSG500-S真空计
350-081PSG500-S 1/8" NPT
350-082PSG500-S DN 16 CF-R
350-083PSG500-S 1/2" Tube
350-084PSG500-S 8-VCR (1/2")
350-085PSG500-S 4-VCR (1/4")
350-086PSG500-S 7/16-20 UNF
350-087PSG500-S DN 16 ISO-KF, ext. body
350-088PSG500-S DN 16 CF-R, ext. body
PSG502-S nickel, setpoints
零件号明细
350-140PSG502-S真空计
350-141PSG502-S 1/8" NPT
350-142PSG502-S DN 16 CF-R
350-143PSG502-S 1/2" Tube
350-144PSG502-S 8-VCR (1/2")
350-145PSG502-S 4-VCR (1/4")
350-146PSG502-S 7/16-20 UNF
350-147PSG502-S DN 16 ISO-KF, ext. body
350-148PSG502-S DN 16 CF-R, ext. body
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号明细
350-200PSG510-S DN 16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号明细
350-300PSG512-S DN 16 ISO-KF

附件

PSG500 tungsten
零件号明细
211-001卡箍 DN 10-16 ISO-KF
PSG500-S tungsten, setpoints
零件号明细
211-001卡箍 DN 10-16 ISO-KF
PSG502-S nickel, setpoints
零件号明细
211-001卡箍 DN 10-16 ISO-KF
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号明细
211-001卡箍 DN 10-16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号明细
211-001卡箍 DN 10-16 ISO-KF

备件

PSG500 tungsten
零件号明细
350-920PSG500备用传感器
350-921PSG500 Spare Sensor 1/8" NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2" Tube
350-924PSG500 Spare Sensor 8-VCR (1/2")
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4")
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG500-S tungsten, setpoints
零件号明细
350-920PSG500备用传感器
350-921PSG500 Spare Sensor 1/8" NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2" Tube
350-924PSG500 Spare Sensor 8-VCR (1/2")
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4")
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG502-S nickel, setpoints
零件号明细
350-900PSG502-S传感器
350-901PSG502 Spare Sensor 1/8" NPT
350-902PSG502 Spare Sensor DN 16 CF-R
350-903PSG502 Spare Sensor 1/2" Tube
350-904PSG502 Spare Sensor 8-VCR (1/2")
350-905PSG502 Spare Sensor 7/16-20 UNF
350-906PSG502 Spare Sensor 4-VCR (1/4")
350-907PSG502 Spare Sensor DN 16 KF,ext.body
350-908PSG502 Spare Sensor DN 16 CF-R,ext.body
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号明细
350-930PSG510 Spare Sensor DN 16 KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号明细
350-940PSG512 Spare Sensor DN 16 KF


相关标签:     真空计,PSG5xx大气压至中真空真空计价格,PSG5xx大气压至中真空真空计批发

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