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BAG302 Medium to Ultra High Vacuum Gauge

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BAG302 Medium to Ultra High Vacuum Gauge

  • 所属分类:真空计

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  • 发布日期:2018/01/04
  • 在线询价
详细介绍

BAG302 Medium to Ultra High Vacuum Gauge

The INFICON single Bayard-Alpert Hot Ion gauge BAG302 covers a wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar (1 × 10-9 to 5 × 10-2 Torr). The compact All-In-One Hot Ion gauge BAG302 offers an easy to exchange dual filament sensor, a built in OLED display, set-point relay and a log-linear analog output as well as an integrated RS485 digital interface for increased integration flexibility. These features combined with the rugged design makes the BAG302 an affordable and repeatable process to base pressure measurement instrument of its own and provides a high value/ low cost of ownership choice.


益处

  • Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)

  • Two standard long-life yttrium oxide coated iridium filaments

  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface

  • Bright digital OLED display with keypad for simple setup, operation and programming

  • User programmable set point relay

  • User programmable display units in mbar, Torr or Pa

  • User selectable Auto-ranging of emission current

  • Mechanical strength and ruggedness

  • Choice of various flange options

  • Easy to exchange sensing element

  • Compliance & standards: CE, RoHS

  • Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)

    (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)


典型应用

  • Pressure measurement in semiconductor process and transfer chambers

  • Industrial coating

  • General vacuum measurement and control in the low to ultra high vacuum range

新闻

We are accepting orders from now on!

规格

类型BAG302
Messurement range1.3 x 10-9 ... 6.7 x 10-2
Accuracy (N2)
1.3×10-8 … 6.7 ×10-2 mbar% of reading±15
1×10-8 … 5×10-2 Torr% of reading±15
Repeatability% of reading±5
Degas
p < 6.7 x 10-5mbarelectron bombardment, 2 min (default)
p < 5.00 x 10-5Torr(programmable between 2 ... 10 min)
Temperature
Operation (ambient)°C0 ... +40
Storage°C-40 ... +70
Bakeout at flange (sensor only, electrics removed)°C200
Supply voltageV (dc)+20 ... +28
Output signal analogV0 ... +9 (log-linear)
Voltage vs. pressurevolts per decade1
Setpoint relay
1 (single-pole double-throw relay (SPDT))
1 A at 30 V (dc) resistive, or V (ac) non-inductive
Electrical connection
D-Sub, 9-pin, male for analog, D-Sub, 9-pin, female for RS485
Interface (digital)
RS485
Emission control
manual
Filament
two Yt2O2 coated Ir
Filament status
display / digital output
Digital functions
degas, filament on/off and emission control
Materials exposed to vacuum
Yt2O3, Ir, W, Ta, stainless steel, glass, Ni
Mounting orientation
any
Internal volumecm³ (in.³)16.4 (1.0)
Weight KF / CF270

零件号

BAG302 Ordering Information.PNG


相关标签:     真空计,BAG302MediumtoUltraHighVacuumGauge价格,BAG302MediumtoUltraHighVacuumGauge批发

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