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Transpector® CPM 3 Compact Process Monitor

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Transpector® CPM 3 Compact Process Monitor

  • 所属分类:气体分析仪

  • 点击次数:
  • 发布日期:2018/01/04
  • 在线询价
详细介绍

Transpector® CPM 3 Compact Process Monitor


 

FAST, FIELD-READY PROCESS MONITORING SYSTEM

 

Performance, Reliability, and Versatility

 

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.


 TranspectorCPM_sil_left_SMALL_noprint.png

Transpector CPM 3 provides proven return on investment to our partners through:

  • Industry Leading Measurement Technology

  • Robust and Adaptive Architecture

  • Ease of Maintenance

  • Superior Product Support

功能

  • Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis

  • ALD-Ready with 1.8 ms per point (555 points per second) measurement speed

  • Field-proven durability and reliability in the most demanding CVD and Etch applications

  • Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts

  • Compact size—allows for easy integration into production semiconductor equipment

  • Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times

  • Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions

  • Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching

规格

类型100 AMU CPM200 AMU CPM300 AMU CPM
Resolution
1 amu wide @ 10% peak height1 amu wide @ 10% peak height1 amu wide @ 10% peak height
Total Pressure Range¹
5E-7 - 1E-3 Torr5E-7 - 1E-3 Torr5E-7 - 1E-3 Torr
Total Pressure Accuracy²
+/- 25% 1E-6 - 1E-3 Torr+/- 25% 1E-6 - 1E-3 Torr+/- 25% 1E-6 - 1E-3 Torr
Maximum Ion Source Operating Pressure³
1E-3 Torr1E-3 Torr1E-3 Torr
Nominal Operating Pressure⁴
2E-4 Torr2E-4 Torr2E-4 Torr
System Operating Pressure
1E-8 Torr - 1.2 atm1E-8 Torr - 1.2 atm1E-8 Torr - 1.2 atm
Sensitivity (Low Emission)
> 4E-6 Amps/Torr> 2E-6 Amps/Torr> 1E-6 Amps/Torr
Sensitivity (High Emission)
> 2E-5 Amps/Torr> 1E-5 Amps/Torr> 5E-6 Amps/Torr
Minimum Detectable Partial Pressure⁵
1E-13 Torr2E-13 Torr4E-13 Torr
Maximum Data Rate
1.8 ms/point (555 points/sec)1.8 ms/point (555 points/sec)1.8 ms/point (555 points/sec)
Abundance Sensitivity⁶
< 5 ppm< 10 ppm< 100 ppm
Zero Blast⁷
< 2 ppm< 25 ppm< 200 ppm
Detection Limit⁸
< 1 ppm< 2 ppm< 4 ppm
Linearity⁹
+/- 20%+/- 20%+/- 20%
Minimum Background Pressure
1E-8 Torr1E-8 Torr1E-8 Torr
Maximum Sensor and Inlet Temperature°C150150150

Ion source pressure reading @ low emission using total pressure lens

Total pressure accuracy @ low emission

Maximum ion source operating pressure @ low emission

2x10-4 Torr in the ion source will produce about 1x10-5 Torr in the quadrupole region

MDPP at the ion source with EM on and 1s dwell time

Mass 40 contribution onto 41 AMU

Zero blast contribution onto 2 AMU

Minimum detectable concentration with Krypton in air @ a 1s dwell time

For 1 Torr orifices or lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure

耗材

100 AMU CPM
零件号明细
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring, CPM
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit
923-706-G10Orifice Kit, CPM, 30 Torr
923-706-G3Orifice Kit, CPM, 10 Torr
923-706-G4Orifice Kit, CPM, 1 Torr
923-706-G6Orifice Kit, CPM, 10 mTorr
923-706-G7Orifice Kit, CPM, 360 mTorr
923-706-G8Orifice Kit, CPM, 15 mTorr
923-706-G9Orifice Kit, CPM, 3 Torr
923-707-G1Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2Sniffer Kit, CPM, 100 Torr
923-707-G3Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner
200 AMU CPM
零件号明细
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring, CPM
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit
923-706-G10Orifice Kit, CPM, 30 Torr
923-706-G3Orifice Kit, CPM, 10 Torr
923-706-G4Orifice Kit, CPM, 1 Torr
923-706-G6Orifice Kit, CPM, 10 mTorr
923-706-G7Orifice Kit, CPM, 360 mTorr
923-706-G8Orifice Kit, CPM, 15 mTorr
923-706-G9Orifice Kit, CPM, 3 Torr
923-707-G1Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2Sniffer Kit, CPM, 100 Torr
923-707-G3Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner
300 AMU CPM
零件号明细
059-0196NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400Replacement c-ring, CPM
070-1042O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1CPM Replacement Diaphragm Kit
923-706-G10Orifice Kit, CPM, 30 Torr
923-706-G3Orifice Kit, CPM, 10 Torr
923-706-G4Orifice Kit, CPM, 1 Torr
923-706-G6Orifice Kit, CPM, 10 mTorr
923-706-G7Orifice Kit, CPM, 360 mTorr
923-706-G8Orifice Kit, CPM, 15 mTorr
923-706-G9Orifice Kit, CPM, 3 Torr
923-707-G1Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2Sniffer Kit, CPM, 100 Torr
923-707-G3Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1Electron Multiplier Kit, Spare
964-710-G1Filament Kit CPM Tungsten
964-710-G2Filament Kit CPM Coated
964-711-G1Ion Source Kit CPM Tungsten
964-711-G2Ion Source Kit CPM Tungsten w/Liner
964-712-G1Ion Source Kit CPM Coated
964-712-G2Ion Source Kit CPM Coated w/Liner

备件

100 AMU CPM
零件号明细
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring, CPM
915-724-G1Spare Ion Source Liner
922-204-G1Capillary, CPM, 1.5 m
922-204-G3Capillary, CPM, 3 m
923-403-P2US18238, SMC VQ100 Manifold for CPM
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock Orifice Replacement tools
923-711-G1HexBlock Valve Replacement Kit
923-712-G1HexBlock Orifice Gasket, Quantity 5
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM
零件号明细
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring, CPM
915-724-G1Spare Ion Source Liner
922-204-G1Capillary, CPM, 1.5 m
922-204-G3Capillary, CPM, 3 m
923-403-P2US18238, SMC VQ100 Manifold for CPM
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock Orifice Replacement tools
923-711-G1HexBlock Valve Replacement Kit
923-712-G1HexBlock Orifice Gasket, Quantity 5
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM
零件号明细
032-0079Turbo Molecular Pump (w/CF40 flange)
059-0400Replacement c-ring, CPM
915-724-G1Spare Ion Source Liner
922-204-G1Capillary, CPM, 1.5 m
922-204-G3Capillary, CPM, 3 m
923-403-P2US18238, SMC VQ100 Manifold for CPM
923-417-G1Foreline Protection Kit, CPM
923-710-G1HexBlock Orifice Replacement tools
923-711-G1HexBlock Valve Replacement Kit
923-712-G1HexBlock Orifice Gasket, Quantity 5
923-723-G22 Stage Diaphragm Foreline Pump
964-208-G11CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1CPM Cable Box Assembly
964-403-P1CPM Manifold Heater
964-603-G2CPM Controller Box
964-720-G1CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable


相关标签: 气体分析仪,Transpector®CPM3CompactProcessMonitor价格,Transpector®CPM3CompactProcessMonitor批发

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