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UHV 可烘烤传感器

UHV 可烘烤传感器

  • 所属分类:薄膜沉积和电子枪控制装置

  • 点击次数:
  • 发布日期:2018/01/04
  • 在线询价
详细介绍

UHV 可烘烤传感器

INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成,设计为可承受连续烘烤温度高达 450° C(仅适用于烘烤,实际沉积监控需要水流)。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。

UHV Bakeable Sensor_detail_sil_left_SMALL.png

功能

  • 高温铜焊和焊接结构

  • 烘烤温度高达 450° C

  • 晶体闸(选件)

  • 前装式晶体支架

  • 易于安装

  • CF40 馈入件

  • 馈入件不需要铜焊或焊接

  • 焊接为客户指定长度的传感器/馈入件组合

规格

类型Bakeable Sensor w/ ShutterBakeable Sensor w/out Shutter
最高温度
400° C continuous (for bake only; water flow recommended for actual deposition monitoring)450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
传感器头部尺寸(最大外壳)
1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
晶体交换
Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
安装

a) Standard—four #4-40 tapped holes on the back of the body

b) Optional—right angle bracket; IPN 007-108

Four #4-40 tapped holes on the back of the body
馈入件

2¾ in. ConFlat®, integral with sensor head

Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)

2¾ in. ConFlat, integral with sensor head

Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)

实用工具

1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)

2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa]

3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required

Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)
材料

主体和支架
304 type stainless steel304 type stainless steel
弹簧
Molybdenum and Inconel X-750Molybdenum and Inconel X-750
水、空气和同轴管线
0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
其他机械部件
18-8 or 304 stainless18-8 or 304 stainless
绝缘体
>99% Al2O3 in vacuum; other high density ceramics used elsewhere>99% Al2O3 in vacuum; other high density ceramics used elsewhere
电线

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

铜焊
Vacuum process high temperature Ni-Cr alloyVacuum process high temperature Ni-Cr alloy
晶体
0.550 in. (13.97 mm) diameter0.550 in. (13.97 mm) diameter

零件号

UHV PN.png

附件

零件号明细
750-420-G1电磁阀,24 伏(与带闸门和多晶体传感器配合使用)

耗材

名称说明
石英监控器晶体石英监控器晶体

备件

零件号明细
007-007止动弹簧(用于晶体支架)
007-064陶瓷夹持器
007-094Clamping Sring, UHV Bakeable Sensor
007-095Handle, UHV Bakeable Sensor
007-098母型连接器(包括套圈和螺母)
007-099可烘烤头部触点
007-100High Temperature BNC Insulator
007-103Insulator, UHV Bakeable Sensor
007-104High Temperature BNC Body, Bakeable
007-147Vented Screw, 4-40 x 3/8 in.
007-155BRAZE ASM 12 IN. 206-804-G1
007-156BRAZE ASM 20 IN 206-804-G2
007-157BRAZE ASM 30 IN 206-804-G3
007-228SPEC,4-40 X 5/8 VENTED SHC SC
007-267-P2Spreader Bar, UHV Bakeable Sensor
007-268-P1Shoulder Washer, UHV Bakeable Sensor
007-269-P1Shoulder Washer, UHV Bakeable Sensor
008-007CRYSTAL SNATCHER
059-0084Gasket, Copper, Bakeable Sensor Actuator
070-201#4 开口紧锁垫圈
084-069-P1SCREW 4-40 x .187 LG PHIL FLAT HD SS
750-018-P3SPLIT CLAMP {THD} {CLEAN} @
750-018-P5SPLIT CLAMP {CLEAN} @
750-022-G5ACTR/AIR LINE 12 IN {CLEAN}
750-022-G6ACTR/AIR LINE 20 IN {CLEAN}
750-022-G7Actuator/Air Line 76.2 cm (30 in.),Clean
750-028-G5BK XTAL SNS/FT/AIR 12 IN CLEAN
750-028-G6BK XTAL SNS/FT/AIR 20 IN CLEAN
750-028-G7BK XTAL SNS/FT/AIR 30 IN CLEAN
750-115-P4联轴器(安装到波纹管组件)
750-118-P4ACT SUPPORT W/ DOWEL
750-120-G3ASSY,SHAFT
750-216-G1闸门组件(闸门模块的组成部分)
750-218-G1Crystal Holder, Bakeable Sensor


相关标签: 薄膜沉积和电子枪控制装置,UHV可烘烤传感器价格,UHV可烘烤传感器批发

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